TY  - BOOK
AU  - Mattox Donald M
TI  - Physical Vapor Deposition (PVD) Processing
SN  - 9780815520375
U1  - 671.735 MAT 
PY  - 2010///
CY  - USA
PB  - Elsevier Pub.
KW  - Deposition (PVD)
KW  - Mattox Donald M
KW  - Physical
KW  - Processing
KW  - Vapor
ER  -