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| 020 | _a9781632382542 | ||
| 082 | _a621.381 VER | ||
| 100 | _aVersuh EVE | ||
| 245 | 0 | _aHandbook of Microelectromechanical System | |
| 260 |
_aNew Jersey _bNY RESEARCH _c2015 |
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| 300 | _a294 | ||
| 690 | _aElectronics and Communications Engineering | ||
| 942 | _cBB | ||
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